OLS5100 Microscope

Model

OLS5100-SAF

OLS5100-SMF

OLS5100-LAF

OLS5100-EAF

Total magnification

54x - 17,280x

Field of view

16 μm - 5,120 μm

Measurement principle

Optical system

Reflection-type confocal laser scanning laser microscope

Reflection-type confocal laser scanning laser-DIC microscope

Color

Color-DIC

Light receiving element

Laser: Photomultiplier (2ch)

Color: CMOS color camera

Height measurement

Display resolution

0.5 nm

Dynamic range

16 bits

Repeatability n-1 ^{*1 *2 *6}

5X : 0.45 μm, 10X : 0.1 μm, 20X : 0.03 μm, 50X : 0.012 μm, 100X : 0.012 μm

Accuracy ^{*1 *3 *6}

0.15 + L/100 μm (L: Measuring length [μm])

Accuracy for stitched image ^{*1 *4 *6}

10X : 5.0+L/100 μm, 20X or higher : 1.0+L/100 μm (L: Stitching length [μm])

Measurement noise
(Sq noise) ^{*1 *5 *6}

1 nm [Typ]

Width measurement

Display resolution

1 nm

Repeatability 3 n-1 ^{*1 *6}

5X : 0.4 μm, 10X : 0.2 μm, 20x : 0.05 μm, 50X : 0.04 μm, 100X : 0.02 μm

Accuracy ^{*1 *3 *6}

Measurement value +/- 1.5%

Accuracy for stitched image ^{*1 *3 *6}

10X : 24+0.5L μm, 20X : 15+0.5L μm, 50X : 9+0.5L μm, 100X : 7+0.5L μm (L: Stitching length [mm])

Maximum number of measuring points in a single measurement

4096 x 4096 pix

Maximum number of measuring points

36 Mpix

XY stage configuration

Length measurement module

•

NA

NA

•

Operating range

100 x 100 mm

Motorized

100 x 100 mm

Manual

300 x 300 mm

Motorized

100 x 100 mm

Motorized

Maximum sample height

100 mm

30 mm

37 mm

210 mm

Laser light source

Wavelength

405 nm

Maximum output

0.95 mW

Laser class

Class 2 (IEC60825-1:2007, IEC60825-1:2014)

Color light source

White LED